Sputtering

Surfactant sputtering

Sputter erosion of materials is among the most important techniques for fabricating advanced thin film coatings. Sputter processes are also of considerable relevance for surface polishing down to an atomic scale, nanostructuring of surfaces as dot and ripple patterns and micromachining of materials using focused ion beams or reactive ion etching. We present a new, versatile sputter technique ut...

Rf sputtering technique pdf

Sputtering of water ice

We present results of a range of experiments of sputtering of water ice together with a guide to the literature. We studied how sputtering depends on the projectile energy and fluence, ice growth temperature, irradiation temperature and external electric fields. We observed luminescence from the decay of H(2p) atoms sputtered by heavy ion impact, but not bulk ice luminescence. Radiolyzed ice do...

Harmonic Sputtering Theory

A New Sputtering Apparatus

The writer, in sputtering a large number of mirrors, has found that the apparatus and methods to be described have several advantages, particularly where very large and perfect mirrors are desired. The accompanying diagram will be self explanatory, and the dimensions given have been found convenient for mirrors up to 10 cm diameter. The apparatus has been designed to avoid the use of any grease...